Magnetic Induction Machines Integrated into Bulk-Micromachined Silicon

Abstract

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 microNu m.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Apr 01, 2006
Accession Number
ADA463055

Entities

People

  • David P. Arnaold
  • Florent Cros
  • Iulica Zana
  • Jeffrey H. Lang
  • Mark G. Allen
  • Sauparna Das

Organizations

  • Georgia Tech

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Gaps
  • Dynamic Response
  • Eddy Currents
  • Electronic Mail
  • Engineering
  • Fabrication
  • Frequency
  • Gas Turbines
  • Generators
  • Magnetic Induction
  • Materials
  • Measurement
  • Microelectromechanical Systems
  • Micromachining
  • Microturbines
  • Three Dimensional
  • Turbines

Readers

  • Computer Engineering
  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.