High Temperature Characterization of Ceramic Pressure Sensors
Abstract
This work reports functional wireless ceramic micromachined pressure sensors operating at 450 C, with demonstrated materials and readout capability indicating potential extension to temperatures in excess of 600 C. These devices are self-packaged and are operating in actual high-temperature environments, not in simulated hot-plate testbeds. A resonant readout technique is employed, in which a planar spiral inductor and a pressure-sensitive capacitor form a passive LC circuit, the resonance frequency of which is sensitive to the external applied pressure, and which can be read out using a simple external loop antenna.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2001
- Accession Number
- ADA463252
Entities
People
- Jennifer M. English
- Mark G. Allen
- Martin Von Arx
- Michael A. Fonseca
Organizations
- Georgia Tech