Transport Properties of Beam-Deposited Pt Nanowires
Abstract
Pt wires were fabricated by using electron-beam (EB) and Ga focused-ion-beam (FIB) irradiation while providing C5H5Pt(CH3)3 gas through a nozzle. Electron transport properties of the wires were investigated. The resistance of the EB-deposited wires was quite high as deposited but was reduced by 3 4 orders of magnitude after 400 -500 degrees C annealing. The electron transport of the as-deposited EB-deposited wire was dominated by the variable range hopping and the Coulomb blockade simultaneously, and showed the antilocalization effect after 400 degrees C annealing. The electron phase-breaking length in the EB-deposited wire with 400 degrees C annealing, which was derived from a theoretical fitting, is ~10 nm at ~4 K and increases with decreasing temperature. This means that ~10 nm fabrication technology and improvement of coherence length are required for coherent vacuum nanoelectronics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2006
- Accession Number
- ADA464540
Entities
People
- F. Wakaya
- Kazuya Murakami
- M. Takai
- N. Yamasaki
- S. Abo
- Y. Tsukatani
Organizations
- Osaka University