Inductive Cross Shaped Metal Meshes in Silicon Substrate

Abstract

Thin inductive metal meshes on silicon substrate have been studied in the infrared spectral region. The wavelength dependent transmissions of meshes with cross shaped, square shaped, rectangular shaped openings, and meshes with grating pattern were measured. The resonance wavelength and width of resonance were determined for various geometries of the openings. The Micro-Stripes program was used for the calculation of resonance wavelength and width of resonance of cross shaped metal meshes and best- fit formulas were developed for the presentation of the data. The dependence on the shape of the opening was studied for free standing thin meshes and meshes on a silicon substrate. The Wood anomaly was studied experimentally for cross, square, rectangular shaped meshes and for gratings on silicon substrate. A simple model for the dependence of the Wood anomaly on the refractive index is presented.

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Document Details

Document Type
Technical Report
Publication Date
Apr 12, 2002
Accession Number
ADA464593

Entities

People

  • H. Grebel
  • K. D. Moller
  • K. P. Stewart
  • O. Sternberg
  • R. M. Henry

Organizations

  • New Jersey Institute of Technology

Tags

DTIC Thesaurus Topics

  • Agreements
  • Aluminum
  • Delta Functions
  • Electrical Engineering
  • Evanescent Waves
  • Experimental Data
  • Frequency Domain
  • Geometry
  • Impedance
  • Intensity
  • Military Research
  • Refractive Index
  • Standards
  • Substrates
  • Surface Waves
  • Thickness
  • Waves

Fields of Study

  • Physics

Readers

  • Finite Element Method (FEM) for solving Partial Differential Equations (PDEs)
  • Nanofabrication and Microfabrication.
  • Spectroscopy.