A Wafer-Bonded, Floating Element Shear-Stress Sensor Using a Geometric Moire Optical Transduction Technique

Abstract

This paper presents a geometric Moire optical-based floating-element shear stress sensor for wind tunnel turbulence measurements. The sensor was fabricated using an aligned waferbond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Measured results indicate a static sensitivity of 0.26 microns/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2/square root Hz.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2007
Accession Number
ADA464931

Entities

People

  • Ken Tedjojuwono
  • Louis N Cattafesta
  • Mark Sheplak
  • Stephen Horowitz
  • Tai-an Chen
  • Toshikazu Nishida
  • Venkataraman Chandrasekaran

Organizations

  • University of Florida

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Aluminum
  • Calibration
  • Deflection
  • Displacement
  • Dynamic Response
  • Elements
  • Frequency
  • Light Sources
  • Measurement
  • Mechanics
  • Plane Waves
  • Pressure Measurement
  • Resonant Frequency
  • Two Dimensional
  • Vibration
  • Waves
  • Wind Tunnels

Readers

  • Fluid Dynamics.
  • Nanofabrication and Microfabrication.
  • Optical Fiber Sensing and Electromagnetic Propagation.