Magnetic Induction Machines Embedded in Fusion-Bonded Silicon

Abstract

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within etched and fusion-bonded silicon to form the machine structure. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 N m and a projected torque density of 340 N-m/m3.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2004
Accession Number
ADA465137

Entities

People

  • David P Arnold
  • Florent Cros
  • Iulica Zana
  • Jeffrey H. Lang
  • Mark G. Allen
  • Sauparna Das

Organizations

  • Georgia Tech

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Abstracts
  • Air Gaps
  • Eddy Currents
  • Efficiency
  • Electronics
  • Electroplating
  • Energy
  • Engineering
  • Fabrication
  • Frequency
  • Generators
  • Magnetic Induction
  • Materials
  • Materials Processing
  • Microturbines
  • Power Electronics
  • Turbines

Fields of Study

  • Materials science

Readers

  • Electrical Engineering
  • Nanofabrication and Microfabrication.
  • Superconducting Magnet Technology