Magnetic Induction Machines Embedded in Fusion-Bonded Silicon
Abstract
This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within etched and fusion-bonded silicon to form the machine structure. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 N m and a projected torque density of 340 N-m/m3.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2004
- Accession Number
- ADA465137
Entities
People
- David P Arnold
- Florent Cros
- Iulica Zana
- Jeffrey H. Lang
- Mark G. Allen
- Sauparna Das
Organizations
- Georgia Tech