Structural Effects in the Dielectric Constant Rare-Earth Oxides: Nd2O3

Abstract

Thin films of Nd2O3 have been studied. For the amorphous phase the dielectric constant is ~ 11 whilst the refractive index is 1.76 0.02, in the cubic form these values are ~ 13.6 15.4 and 1.93 0.02. Hexagonal films have dielectric constants in the range 17 21 and estimates based upon the cubic values lead to k ~ 27, we were unable to determine a reliable refractive index value. The normally high temperature hexagonal phase could be nucleated on a Si substrate by deposition at relatively low temperature ~ 280 C.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2006
Accession Number
ADA465166

Entities

People

  • P. Gonon
  • R. A. Devine
  • T. Busani

Tags

DTIC Thesaurus Topics

  • Air Force Research Laboratories
  • Amorphous Materials
  • Dielectric Permittivity
  • Diffraction
  • Field Effect Transistors
  • Films
  • High Temperature
  • Materials
  • Measurement
  • Metal Oxide Semiconductors
  • Optical Properties
  • Refractive Index
  • Spectra
  • Substrates
  • Thin Films
  • X Rays
  • X-Ray Diffraction

Readers

  • Materials Science and Engineering.
  • Systems Analysis and Design