Effect of Electron Detachment on the Wall Potential and Plasma Evolution in the Afterglow Stage
Abstract
It is demonstrated that detachment of electrons in the afterglow of an electronegative plasma can lead to a significant increase in negative wall potential with respect to the plasma potential. This effect can be used to modify the near-wall sheath electric field and thickness, which are important for plasma processing applications. Also in the afterglow, this effect can lead to an increase in electron density with time, and a reduction (up to total exclusion) in diffusion cooling of electrons and can thus be used to modify the electron temperature.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2006
- Accession Number
- ADA465611
Entities
People
- A. A. Kudryavtsev
- C. A. Dejoseph Jr.
- E. A. Bogdanov
- V. I. Demidov
Organizations
- Saint Petersburg State University