High-Filling-Fraction Inverted ZnS Opals Fabricated by Atomic Layer Deposition
Abstract
The infiltration of three-dimensional opal structures has been investigated by atomic layer deposition. Demonstrations using ZnS:Mn show that filling fractions >95% can be achieved and that the infiltrated material is of high-quality crystalline material as assessed by photoluminescence measurements. These results demonstrate a flexible and practical pathway to attaining high-performance photonic crystal structures and optical microcavities.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 29, 2003
- Accession Number
- ADA465733
Entities
People
- C. J. Summers
- C. W. Neff
- D. Morton
- E. Forsythe
- J. S. King
- S. Blomquist
- W. Park
Organizations
- Georgia Tech