Microfabrication of a Mechanically Controllable Break Junction in Silicon

Abstract

The authors present a detailed description of the microfabrication and operation at room temperature of a novel type of tunnel displacement transducer. Instead of a feedback system, it relies on a large reduction factor, assuring an inherently stable device. Stability measurements in the tunnel regime infer an electrode stability within 3 pm in a 1 kHz bandwidth. In the contact regime, the conductance takes on a discrete number of values when the constriction is reduced atom by atom. This reflects the conduction through discrete channels.

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Document Details

Document Type
Technical Report
Publication Date
Aug 21, 1995
Accession Number
ADA466432

Entities

People

  • Caroline J. Muller
  • Chong Zhou
  • J. W. Sleight
  • M. A. Reed
  • M. R. Deshpande

Organizations

  • Yale University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Closed Loop Systems
  • Detectors
  • Displacement
  • Electrodes
  • Electron Beam Lithography
  • Electron Beams
  • Elongation
  • Fabrication
  • Feedback
  • Materials
  • Measurement
  • Microfabrication
  • Resistance
  • Standards
  • Transducers
  • Tunnels
  • Vacuum

Fields of Study

  • Physics

Readers

  • Control Systems Engineering.
  • Powder metallurgy of Titanium alloys.
  • Systems Analysis and Design

Technology Areas

  • AI & ML
  • AI & ML - Autonomous Systems