MEMS Shear Stress Sensors: Promise and Progress

Abstract

This paper reviews existing microelectromechanical systems (MEMS)-based shear stress sensors. The promise and progress of MEMS scaling advantages to improve the spatial and temporal resolution and accuracy of shear stress measurement is critically reviewed. The advantages and limitations of existing devices are discussed. Finally, unresolved technical issues are summarized for future sensor development.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2004
Accession Number
ADA467470

Entities

People

  • Catherine B. Mcginley
  • Louis N Cattafesta
  • Mark Sheplak
  • Toshikazu Nishida

Organizations

  • University of Florida

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Boundary Layer
  • Climate Change
  • Computational Fluid Dynamics
  • Detection
  • Dynamic Response
  • Fabrication
  • Frequency Response
  • Heat Transfer
  • Manufacturing
  • Measurement
  • Mechanical Properties
  • Microelectromechanical Systems
  • Micromachining
  • Shear Stresses
  • Stresses
  • Turbulent Boundary Layer
  • Wind Tunnels

Readers

  • Inertial Navigation Systems.
  • Mechanical Engineering/Mechanics of Materials.
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems