A Fully-Integrated MEMS Preconcentrator for Rapid Gas Sampling (Preprint)

Abstract

A new type of fully integrated MEMS preconcentrator has been fabricated and tested as a front end for a flame ionization detector (FID). A 1 microliter preconcentrator filled with PEI-coated microposts is integrated with fast microvalves (response time < 50 microsecs) and a resistive microheater (ramping to 200C in 0.5 second). The integrated preconcentrator can sample a cubic centimeter of gas in 0.2 second at 50 kPa, adsorb targeted species, heat and desorb in 0.5 second, and inject concentrated gaseous species in as small as 50 &#956;s pulses into separation columns in a microscale gas chromatograph (GC), or directly into a detector. The unprecedented speed of this preconcentrator (< 1 second) is enabled by MEMS sizing and fabrication, allowing sniffing of chemical warfare agents, toxic industrial compounds (TICs), and other volatile compounds in seconds, rather than tens of minutes with conventional systems.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2006
Accession Number
ADA468430

Entities

People

  • Adarsh D. Radadia
  • Byunghoon Bae
  • Junghoon Yeom
  • Mark A. Shannon
  • Richard I. Masel

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Air Force Research Laboratories
  • Chemical Warfare
  • Chemical Warfare Agents
  • Detectors
  • Electrodes
  • Electron Microscopes
  • Engineering
  • Fabrication
  • Governments
  • Membranes
  • Military Research
  • Reactive Ion Etching
  • Sampling
  • Scanning Electron Microscopes
  • Schematic Diagrams
  • Warfare

Readers

  • Analytical Chemistry
  • Electrical Engineering
  • Integrated Circuit Design and Technology.