Equipment for Parallel High Speed Nano-Manufacturing
Abstract
This project is to request equipment funding for a novel parallel, high speed, large scale nano-manufacturing instrument. The key element of the instrument is a nanoscale optical antenna capable of producing a nanometer size light spot, which has been demonstrated in the PI's laboratory. With the use of an array of nanoscale optical antenna to produce a large number of nanometer size laser beams, a large number of patterns can be fabricated simultaneously, or a complex pattern with nanometer size features can be fabricated over a large area. We have acquired the necessary equipment and have built the instrument. Current research is focused on testing the instrument for parallel nano-manufacturing.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 29, 2006
- Accession Number
- ADA470798
Entities
People
- Xianfan Xu
Organizations
- Purdue University