Nanofabrication of Photonic Crystal Membrane Lasers
Abstract
We present techniques for fabricating photonic crystal ~PC! membrane defect lasers. These nanostructures operate as optically pumped lasers under pulsed conditions at room temperature. The thin membrane PC defect structures are formed by transferring an electron-beam lithographically defined lattice pattern into an epitaxial layer structure by a sequential process of ion beam etching, reactive ion etching, and electron cyclotron resonance etching steps. A V-shape undercut channel is formed by a wet chemical etching using a 4:1 mixture of HCl and H2O to create the suspended membrane. We include a detailed description of a dependable and repeatable HCl undercut process for the PC structure.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 14, 2002
- Accession Number
- ADA471287
Entities
People
- J. R. Cao
- John D. O'brien
- Paul Daniel Dapkus
- Po-tsung Lee
- Roshanak Shafiha
- Sang-jun Choi
- Seung-june Choi
Organizations
- University of Southern California