Microring Resonators Vertically Coupled to Buried Heterostructure Bus Waveguides

Abstract

The authors demonstrate all epitaxial semiconductor microring resonators vertically coupled to buried heterostructure (BH) bus waveguides for the first time. Planar vertically stacked waveguides are successfully grown on BH mesas by conducting a two-step regrowth process. This approach is potentially important for any buried waveguide technology where subsequent surface planarity is required. The measured transmission spectra show resonance dips (1.55 ~ 1.60) micrometers with quality factors, extinction ratios, and free spectral ranges of 2500-3.5 dB, and ~11 nm, respectively, for 10- micrometers-radii microrings.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2005
Accession Number
ADA471605

Entities

People

  • Giora Griffel
  • John Connolly
  • Kostadin Djordjev
  • Paul Daniel Dapkus
  • Ray Menna
  • Sang J. Choi
  • Seung J. Choi
  • Wilson Lin

Organizations

  • University of Southern California

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Coefficients
  • Couplings
  • Electrical Engineering
  • Engineering
  • Etching
  • Fabrication
  • Geometry
  • Heterojunctions
  • Losses
  • Materials
  • Measurement
  • Resonance
  • Resonators
  • Semiconductors
  • Three Dimensional
  • Waveguides

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics