Differential Sputter Yields of Boron Nitride, Quartz, and Kapton Due to Low Energy Xe+ Bombardment (Preprint)

Abstract

In this contribution we present results of differential sputter yield measurements of boron nitride, quartz, and kapton due to bombardment by xenon ions. The measurements are made using a sputtering diagnostic based on a quartz crystal microbalance (QCM). The QCM measurement allows full angular resolution, i.e. differential sputtering yield measurements are measured as a function of both polar angle and azimuthal angle. Measured profiles are presented for 100, 250, 350 and 500 eV Xe+ bombardment at 0?, 15?, 30? and 45? angles of incidence. We fit the measured profiles with Modified Zhang expressions using two free parameters: the total sputter yield, Y, and characteristic energy E*. Total yields are calculated from the differential profiles and are compared with published values and weight loss values where possible.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2007
Accession Number
ADA472977

Entities

People

  • A. P. Yalin
  • B. Rubin
  • John D. Williams
  • S. R. Domingue
  • Z. Glueckert

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Air Force Research Laboratories
  • Astronautics
  • Body Weight
  • Ceramic Materials
  • Electric Propulsion
  • Engineering
  • Erosion
  • Ion Beams
  • Ion Sources
  • Materials
  • Measurement
  • Mechanical Engineering
  • Quartz Crystal Microbalances
  • Spacecraft
  • Spacecraft Components
  • Sputtering

Fields of Study

  • Physics

Readers

  • Aerospace Propulsion Engineering.
  • Molecular Photonics/Laser Physics
  • Solar Physics