Species-Specific Sputtering Measurements with Cavity Ring-Down Spectroscopy (Preprint)

Abstract

We report sputtering studies using cavity ring-down spectroscopy (CRDS). The high sensitivity of the technique and its non-intrusive nature make it amenable to both in situ device studies as well as basic characterization studies. We provide demonstrative measurements of sputtered particles showing the ability to determine species-specific number density and velocity. We summarize a spatial-scanning approach for differential sputter yield measurements and give a measurement example based on a tantalum target. We discuss the use of CRDS for measurement of multi-component materials and provide experimental results for detection of a Fe-Mn target as well as a proposed detection scheme for boron nitride.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2007
Accession Number
ADA472978

Entities

People

  • A. P. Yalin
  • Tao Li
  • V. K. Surla

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Absorption Coefficients
  • Air Force Research Laboratories
  • Ceramic Materials
  • Detection
  • Electric Propulsion
  • Ground State
  • Laser Induced Fluorescence
  • Lasers
  • Materials
  • Measurement
  • Mechanical Engineering
  • Metals
  • Quartz Crystal Microbalances
  • Refractory Metals
  • Spectra
  • Spectroscopy
  • Tantalum

Readers

  • Aerospace Propulsion Engineering.
  • Optical Fiber Sensing and Electromagnetic Propagation.
  • Systems Analysis and Design