Specific Approach for Size-Control III-V Quantum/Nano LED Fabrication for Prospective White Light Source

Abstract

This research achieved a nano-structure LED to enhance the light extraction efficiency in III-V nitride LED. The Triangular lattice PC LED with diameter/periodicity of 300/500nm were patterned separately using the AAO template, E-beam lithography, and then the ICP etching technique. The PC LED could get low and stable forward voltage as compared to the AAO LED and conventional LED. The optical and electrical properties of the nano-structure LED was demonstrated in this project.

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Document Details

Document Type
Technical Report
Publication Date
Aug 10, 2007
Accession Number
ADA473080

Entities

People

  • Huey-liang Hwang

Organizations

  • National Tsing Hua University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Crystal Structure
  • Crystals
  • Diameters
  • Efficiency
  • Electrical Properties
  • Electron Beam Lithography
  • Extraction
  • Fabrication
  • Light Sources
  • Lithography
  • Nanotechnology
  • Optical Properties
  • Photonic Crystals
  • Quantum Efficiency
  • Quantum Wells
  • Template Patterns
  • White Light

Fields of Study

  • Materials science

Readers

  • Cardiovascular Physiology
  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology

Technology Areas

  • Quantum Computing