Calculating Sputter Rate Angular Dependence Using Optical Profilometry (Preprint)

Abstract

This work attempts to determine angular dependence curves for sputter rates of a material based on a single experimental measurement. An aluminum cylinder was exposed to a BHT-200 plume, and the resulting erosion profile was measured. This profile was fed into an optimizer, which calculated the angular dependence curve to match the given erosion profile. The calculated profile matched well with the experimental profile; however, neither matched well with previously published results. The likely cause of this discrepancy was the non-uniformity of the ion source used. As a further validation of the optimization routine, the angular dependence curve was input to the COLISEUM plasma modeling code, which generated the same erosion profile as the experimental data.

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Document Details

Document Type
Technical Report
Publication Date
Jul 26, 2007
Accession Number
ADA473515

Entities

People

  • Alexander C. Barrie
  • Bryan S. Taylor
  • Jared M. Ekholm
  • William A. Hargus

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Air Force
  • Air Force Research Laboratories
  • Aluminum
  • Electric Propulsion
  • Elements
  • Engineers
  • Experimental Data
  • Hall Thrusters
  • Ion Sources
  • Ion Thrusters
  • Ions
  • Materials
  • Measurement
  • Military Research
  • Optimization
  • Particle Flux
  • Thrusters

Fields of Study

  • Physics

Readers

  • Aerospace Propulsion Engineering.
  • Approximation Theory.
  • Plasma Physics / Magnetohydrodynamics