Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint)

Abstract

We present results of differential sputter yield measurements of HBC and HBR grades of boron nitride due to bombardment by xenon ions. Total sputter yield measurements are made using a weight loss approach. Differential sputter yield measurements (of condensable components) are made using a quartz crystal microbalance (QCM). The QCM measurement allows full angular resolution, i.e. differential sputtering yield measurements are measured as a function of both polar angle and azimuthal angle. Measured profiles are presented for 100, 250, 350 and 500 eV Xe+ bombardment at 0-degree, 15-degree, 30-degree, and 45-degree angles of incidence. We fit the measured profiles with Modified Zhang expressions using two free parameters: the total sputter yield, Y, and characteristic energy E*. Sputtering of HBC versus HBR grades of BN is compared, as is results of sputter measurements from the weight loss versus QCM approaches. Finally, effects of sample moisture absorption are considered.

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Document Details

Document Type
Technical Report
Publication Date
Sep 20, 2007
Accession Number
ADA473519

Entities

People

  • Azer P. Yalin
  • Binyamin Rubin
  • James L. Topper

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies
  • Space

DTIC Thesaurus Topics

  • Absorption
  • Air Force Research Laboratories
  • Body Weight
  • Ceramic Materials
  • Current Density
  • Electric Propulsion
  • Erosion
  • Ion Beams
  • Ion Sources
  • Mass Spectrometry
  • Materials
  • Materials Processing
  • Materials Science
  • Measurement
  • Mechanical Engineering
  • Microbalances
  • Quartz Crystal Microbalances

Fields of Study

  • Physics

Readers

  • Mathematics or Statistics
  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.