Design of the Transmission Electron Microscope (TEM) Sampler Scriber Template as Developed to Improve and Simplify the Sample Preparation Procedure

Abstract

The image quality and visibility of the crystal planes in a TEM sample directly relate to how we initially cleave the wafer during the sample preparation process. For diffraction-contrast imaging, many defects and other crystalline features are orientation specific, and are only visible along certain zone axes. The resolution limits of the TEM dictate the preferred zone axes for phase-contrast imaging. The TEM Sample Scribing Template described here allows easy selection of the zone axes by cleaving the wafer along specific crystal directions.

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 2007
Accession Number
ADA473696

Entities

People

  • Wendy L. Sarney

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Contrast
  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Diffraction
  • Electron Beams
  • Electron Microscopes
  • Electron Microscopy
  • Electrons
  • High Resolution
  • Materials
  • Microscopes
  • Military Research
  • Orientation (Direction)
  • Template Patterns
  • Transmission Electron Microscopy
  • Visibility

Readers

  • Medical Imaging.
  • Nanofabrication and Microfabrication.
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene