MEMS PolyMUMPS-Based Miniature Microphone for Directional Sound Sensing

Abstract

A miniature directional sound sensor was fabricated using micro-electro-mechanical system (MEMS) technology based on the operational principle of Ormia ochracea fly s hearing organ. The fly uses coupled bars hinged at the center to achieve the directional sound sensing by monitoring the difference in vibration amplitude between them. The MEMS sensor design employed in this thesis was fabricated using the PolyMUMPs process. The sound sensor has two primary vibrational modes (rocking

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2007
Accession Number
ADA474398

Entities

People

  • Timothy J. Shivok

Organizations

  • Naval Postgraduate School

Tags

Communities of Interest

  • Advanced Electronics
  • Ground and Sea Platforms
  • Sensors

DTIC Thesaurus Topics

  • Acoustic Propagation
  • Aircrafts
  • Computer Programs
  • Doppler Effect
  • Fabrication
  • Frequency
  • Manufacturing
  • Measurement
  • Mechanics
  • Microelectromechanical Systems
  • Radar
  • Resonant Frequency
  • Three Dimensional
  • Two Dimensional
  • Undersea Warfare
  • Unmanned Underwater Vehicles
  • Waves

Readers

  • Auditory Neuroscience/Auditory Physiology.
  • Integrated Circuit Design and Technology.
  • Optical Fiber Sensing and Electromagnetic Propagation.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems