Preparation of Ultra Thin Polystyrene, Polypropylene and Polyethylene Films on Si Substrate Using Spin Coating Technology

Abstract

Preparation of ultra thin polystyrene, polypropylene and polyethylene films on silicon substrate using the spin coating technique is discussed in this report. The influence of various process parameters on the obtained film quality including Si wafer preparation, choice of solvent, influence of the solution concentration on the coating and sample positioning on the spin coater are shown. The polymer film surface morphology, thickness and chemical composition were analyzed by atomic force microscopy, profilometery, n&k spectrometry, ellipsometry and X-ray photoelectron spectrometry. Contact angle measurements were performed to characterize the polymer surface energy.

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Document Details

Document Type
Technical Report
Publication Date
Jan 04, 2008
Accession Number
ADA475808

Entities

People

  • Evgeniya Lock
  • Richard Fernsler
  • Scott G. Walton

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Data Analysis
  • Detectors
  • Dielectric Polymers
  • Electron Energy
  • Electrons
  • Films
  • Geometry
  • Materials
  • Measurement
  • Polymeric Films
  • Polymers
  • Refractive Index
  • Spectroscopy
  • Spin Coatings
  • Thin Films
  • X Rays

Fields of Study

  • Materials science

Readers

  • Polymer Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene