RHEEDAX Induced X-ray Fluorescence Analysis System for Oxide MBE

Abstract

A total reflection x-ray fluorescence spectroscopy system excited with an electron gun of reflection high-energy electron diffraction tool (RHEED-TRAXs) for in Situ material characterization has been designed, components have been purchased, and the tool has been assembled and installed on a Riber 3200 molecular-beam epitaxy system customized for oxide growth.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2008
Accession Number
ADA478727

Entities

People

  • Hadis H. Morkoç̌

Organizations

  • Virginia Commonwealth University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Detectors
  • Diffraction
  • Electron Diffraction
  • Electron Guns
  • Electrons
  • Energy
  • Epitaxial Growth
  • Fluorescence
  • High Energy
  • Materials
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Reflection
  • Spectroscopy
  • X Ray Spectroscopy
  • X Rays
  • X-Ray Detectors

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene