Q2 Known Good Substrates

Abstract

The Known Good Substrates (KGS) Phase II program was initiated 29 August 2007. Wafer, epitaxy, modeling and metrology work has been the main focus of efforts in Q2. This technical report summarizes the progress by all team members against the tasks and milestones.

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Document Details

Document Type
Technical Report
Publication Date
Mar 27, 2008
Accession Number
ADA478838

Entities

People

  • Brian Russell
  • Eric Carlson
  • Gilyong Chung
  • Mark Loboda

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Contractors
  • Contracts
  • Crystal Defects
  • Crystal Growth
  • Crystal Structure
  • Crystals
  • Demographic Cohorts
  • Diameters
  • Epitaxial Growth
  • Grain Boundaries
  • Materials
  • Measurement
  • Metrology
  • Phase
  • Semiconductors
  • Silicon Carbide
  • Substrates

Readers

  • Materials Science and Engineering.
  • Technical Research and Report Writing.