Two-Dimensional Electron Gas in Strained Silicon for Studying Ultra-Low Energy Electronic Processes

Abstract

The proposed research focuses on the fabrication of high mobility 2D electron gases or low density for the understanding of correlated electron behavior under extreme conditions: low temperature and high magnetic field. The experimental efforts are in 3 related topics: (1) fabricate 2DES in strained Si with the highest achievable electron mobility; (2) fabricate 2DES in strained Si with low electron density; and (3) explore alternative approaches for fabricating strained Si without the relaxed buffer layer that is heavily dislocated and therefore causing strain undulation in the Si channel. Significant progress has been made in carrier mobility and the fabrication of strained films using porous Si. We have gained the ability to reproducibly fabricate 2DES samples with mobility above 300,000 cm2/V-s. By controlled oxidation of porous Si, we have obtained strained films with up to 0.8% tensile strain, suitable for 2DES transport research without ever introducing dislocations. The outcome of our research has led to significant advancement in our ability of fabricating high quality samples for the understanding of correlated electron behavior.

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Document Details

Document Type
Technical Report
Publication Date
Mar 10, 2008
Accession Number
ADA479239

Entities

People

  • Daniel Tsui
  • Ya-Hong Xie

Organizations

  • University of California, Los Angeles

Tags

Communities of Interest

  • Advanced Electronics
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Carrier Mobility
  • Dislocations
  • Electron Density
  • Electron Gas
  • Electron Mobility
  • Energy Bands
  • Epitaxial Growth
  • Fabrication
  • Free Electrons
  • Low Density
  • Low Temperature
  • Magnetic Fields
  • Measurement
  • Mobility
  • Molecular Beam Epitaxy
  • Quantum Wells
  • Two Dimensional

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene