Formation of Primary Amines on Silicon Nitride Surfaces: a Direct, Plasma-Based Pathway to Functionalization

Abstract

Silicon nitride is the most commonly used passivation layer in biosensor applications where electronic components must be interfaced with ionic solutions. Unfortunately, the predominant method for functionalizing silicon nitride surfaces, silane chemistry, suffers from a lack of reproducibility. As an alternative, we have developed a silane-free pathway that allows for the direct functionalization of silicon nitride through the creation of primary amines formed by exposure to a radio frequency glow discharge plasma fed with humidified air. The aminated surfaces can then be further functionalized by a variety of methods; here we demonstrate using glutaraldehyde as a bifunctional linker to attach a robust NeutrAvidin (NA) protein layer. Optimal amine formation, based on plasma exposure time, was determined by labeling treated surfaces with an amine-specific fluorinated probe and characterizing the coverage using X-ray photoelectron spectroscopy (XPS). XPS and radiolabeling studies also reveal that plasma-modified surfaces, as compared with silane-modified surfaces, result in similar NA surface coverage, but notably better reproducibility.

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Document Details

Document Type
Technical Report
Publication Date
Jan 19, 2007
Accession Number
ADA480927

Entities

People

  • Kristy M. Ainslie
  • Lloyd J. Whitman
  • Rory Stine Christina L. /cole
  • Shawn P. Mulvaney

Organizations

  • United States Naval Research Laboratory

Tags

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Ceramic Materials
  • Chemical Synthesis
  • Chemistry
  • Compound Semiconductors
  • Electron Spectroscopy
  • Electronics Industry
  • Films
  • Glow Discharges
  • Low Temperature
  • Materials
  • Measurement
  • Radio Frequency
  • Silicon Compounds
  • Surface Chemistry
  • Surface Roughness

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Molecular and Cellular Biochemistry
  • Thin Film Deposition Science.

Technology Areas

  • Biotechnology
  • Microelectronics
  • Microelectronics - Graphene