Versatile Sample Handling System for Scanning Tunneling Microscopy Studies of Molecular Beam Epitaxy

Abstract

The ongoing development of short-period semiconductor superlattices for electronic and optoelectronic applications requires atomic-scale control of epitaxial growth, especially at the interfaces. Given this requirement, there is a critical need for in situ characterization on the atomic scale as provided by scanning tunneling microscopy (STM). Here we describe a sample handling system designed to integrate a modified commercial STM into a multichamber ultrahigh vacuum (UHV) molecular beam epitaxy (MBE) facility. The system uses a simple, yet versatile, sample holder design that enables quick and easy sample transfers between multiple chambers, including two Riber MBE and two surface characterization chambers interconnected by Riber UHV ModuTrac (Trademark).

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1996
Accession Number
ADA481105

Entities

People

  • F. Linker
  • J. Patrin
  • Lloyd J. Whitman
  • P. M. Thibado

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Electron Diffraction
  • Electronic Mail
  • Epitaxial Growth
  • Fungi
  • Grazing Angles
  • High Energy
  • Manipulators
  • Microscopy
  • Military Research
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Molybdenum
  • Quantum Tunneling
  • Scanning
  • Semiconductors
  • Tunneling
  • Ultrahigh Vacuum

Fields of Study

  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene