A Micromachined Magnetic-Field Sensor Based on an Electron Tunneling Displacement Transducer

Abstract

We describe a micromachined magnetic-field sensor that is based on an electron tunneling transducer. This tunnel sensor is small, very sensitive, operates at ambient temperature and requires very little power. The measured resolution of the sensor is 0.3 nT/square root of Hz at 1 Hz. The limiting resolution, calculated based on fundamental noise sources, is 0.002 nT/square root of Hz at 1 Hz. The dominant source of the observed noise in the present device is low frequency air pressure fluctuations.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2000
Accession Number
ADA481222

Entities

People

  • D. Dilella
  • E. C. Vote
  • J. A. Podosek
  • L. M. Miller
  • Lloyd J. Whitman
  • R. J. Colton
  • T. W. Kenny
  • W. J. Kaiser

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors
  • Weapons Technologies

DTIC Thesaurus Topics

  • Air Pressure
  • Assembly
  • Chemistry
  • Detection
  • Detectors
  • Fabrication
  • Frequency
  • Infrared Detectors
  • Jet Propulsion
  • Magnetic Detectors
  • Magnetic Fields
  • Magnetometers
  • Materials Science
  • Measurement
  • Microelectromechanical Systems
  • Micromachining
  • Transducers

Fields of Study

  • Physics

Readers

  • Acoustics.
  • Fluid Dynamics.
  • Plasma Physics / Magnetohydrodynamics

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems