Step Structure and Surface Morphology of Hydrogen-Terminated Silicon: (001) to (114)

Abstract

We have determined the equilibrium step structures and surface morphology for the whole range of monohydride-terminated (0 0 1) -terrace-plus-step silicon surfaces using scanning tunneling microscopy. The transformation in the equilibrium Si surface morphology caused by H-termination can be categorized into three different regimes delineated by the types of steps present on the clean surfaces. On nominal Si(0 0 1),the single-layer height B-type steps (SB) are mostly non-rebonded and rougher after H passivation. On surfaces dominated by double-layer height B-type steps (DB),such as Si(1 1 1 1),the non-rebonded DB and SB steps show a lower formation energy. Measurements on post-annealed surfaces indicate that the DB step formation energies strongly depend on H chemical potential. Smoother morphologies are observed following H-termination of surfaces oriented approximately between (1 1 7) and (1 1 4). This effect is quite apparent on Si (1 1 5),where the monohydride surface exhibits large (1 1 5)-(2 2) domains,a structure not observed on the clean surface. All of these structural modifications result directly from a change in the relative energies of the possible single- and double-layer step configurations.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2003
Accession Number
ADA481249

Entities

People

  • A. R. Laracuente
  • Lloyd J. Whitman

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Adsorption
  • Atoms
  • Contrast
  • Desorption
  • Energy
  • High Resolution
  • Hydrogen
  • Measurement
  • Microscopy
  • Orientation (Direction)
  • Probability
  • Quantum Tunneling
  • Scanning
  • Statistics
  • Surface Roughness
  • Surface Temperature
  • Tunneling

Fields of Study

  • Materials science

Readers

  • Nanofabrication and Microfabrication.
  • Thin Film Deposition Science.