Low-Loss 4-6 GHz Tunable Filter with 3-Bit High-Q Orthogonal RF-MEMS Capacitance Network

Abstract

A low loss 4-6 GMz 3-bit tunable filter was designed and fabricated on a quarz substrate. A high-Q 3-bit orthogonal RF-MEMS capacitance network is presented and its significance on the filter Q is discussed. Detailed design equations for the capacitively-loaded coupled open-loop,=2 resonators and realization of capacitive external coupling with source-load impedance loading are discussed. The measured filter shows an unloaded-Q of 85-170, an insertion loss of 1.5-2.8 dB (including connector loss), and the measured 1-dB bandwidth is 4.35 +- 0.35% over the 4-6 GMz tuning range. The measured IIP3 and 1-dB power compression point at 5.91 GMz are > 40 dBm and 27.5 dBm, respectively. The unloaded Q and insertion loss can be improved to 125-210 and 1.8-1.1 dB with the use of a thicker bottom electrode. To our knowledge, this is the highest Q tunable planar filter to-date at this frequency range.

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Document Details

Document Type
Technical Report
Publication Date
Mar 23, 2008
Accession Number
ADA481477

Entities

People

  • Gabriel M. Rebeiz
  • Isak Reines
  • Kamal Sarabandi
  • Mohammed A. El-tanani
  • Sang-june Park

Organizations

  • University of Michigan

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Capacitance
  • Circuits
  • Communication Systems
  • Computer Science
  • Electric Fields
  • Electrical Engineering
  • Electronic Mail
  • Engineering
  • Equivalent Circuits
  • Filters
  • Frequency
  • Frequency Shift
  • Impedance
  • Insertion Loss
  • Losses
  • Microelectromechanical Systems
  • Simulations

Readers

  • Microwave Engineering.