Low-Loss 4-6 GHz Tunable Filter with 3-Bit High-Q Orthogonal RF-MEMS Capacitance Network
Abstract
A low loss 4-6 GMz 3-bit tunable filter was designed and fabricated on a quarz substrate. A high-Q 3-bit orthogonal RF-MEMS capacitance network is presented and its significance on the filter Q is discussed. Detailed design equations for the capacitively-loaded coupled open-loop,=2 resonators and realization of capacitive external coupling with source-load impedance loading are discussed. The measured filter shows an unloaded-Q of 85-170, an insertion loss of 1.5-2.8 dB (including connector loss), and the measured 1-dB bandwidth is 4.35 +- 0.35% over the 4-6 GMz tuning range. The measured IIP3 and 1-dB power compression point at 5.91 GMz are > 40 dBm and 27.5 dBm, respectively. The unloaded Q and insertion loss can be improved to 125-210 and 1.8-1.1 dB with the use of a thicker bottom electrode. To our knowledge, this is the highest Q tunable planar filter to-date at this frequency range.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 23, 2008
- Accession Number
- ADA481477
Entities
People
- Gabriel M. Rebeiz
- Isak Reines
- Kamal Sarabandi
- Mohammed A. El-tanani
- Sang-june Park
Organizations
- University of Michigan