Non Destructive 3D X-Ray Imaging of Nano Structures & Composites at Sub-30 NM Resolution, With a Novel Lab Based X-Ray Microscope
Abstract
In this article we describe a 3D x-ray microscope based on a laboratory x-ray source operating at 2.7, 5.4 or 8.0 keV hard x-ray energies. X-ray computed tomography (XCT) is used to obtain detailed 3D structural information inside optically opaque materials with sub-30 nm resolution. Applications include imaging internal 3D arrays of nanostructures of smart materials, polymer nanocomposites, porosity and structural imaging within fuel cells; understanding the internal workings of nanosensors, imaging of whole hydrated cells and tissues; non destructive reverse engineering and failure analysis of semiconductor circuitry and MEMs devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 2006
- Accession Number
- ADA482013
Entities
People
- Andrei Tkachuk
- Frederick Duewer
- Hongtao Cui
- Michael Feser
- S. H. Lau
- Wenbing Yun
- Yuxing Wang