Development of Ultra Sensitive Piezoresistive Sensors Using AlAs 2D Electrons
Abstract
The electronic properties of the two-dimensional (2D) electron systems in modulation-doped AlAs quantum wells are investigated, with the goal of developing this material as a sensor with an unprecedented, large sensitivity to stress and/or strain. Such a sensor may find use in various scanning probe microscopes, and in other applications where minute amounts of variables such as force, displacement, or pressure need to be measured.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 14, 2008
- Accession Number
- ADA482354
Entities
People
- Mansour Shayegan
Organizations
- Princeton University