Quantification of Discrete Oxide and Sulfur Layers on Sulfur-Passivated InAs by XPS

Abstract

The initial quality and stability in air of InAs(001) surfaces passivated by a weakly-basic solution of thioacetamide (CH3CSNH2) is examined by XPS. The S-passivated InAs(001) surface can be modeled as a sulfur-indium-arsenic layer-cake structure, such that characterization requires quantification of both arsenic oxide and sulfur layers that are at most a few monolayers thick. This thickness range complicates the quantitative analysis because neither standard submonolayer nor thick-film models are applicable. Therefore, we develop a discrete-layer model and validate it with angle-resolved XPS data and electron attenuation length (EAL) calculations. We then apply this model to empirically quantify the arsenic oxide and sulfur coverage on the basis of the corresponding XPS intensity ratios.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2005
Accession Number
ADA482529

Entities

People

  • D. Y. Petrovykh
  • J. M. Sullivan
  • Lloyd J. Whitman

Organizations

  • University of Maryland

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Aqueous Solutions
  • Chemical Shifts
  • Chemistry
  • Compound Semiconductors
  • Diffraction
  • Electron Energy
  • Films
  • High Resolution
  • Materials
  • Measurement
  • Military Research
  • Scattering
  • Self Assembled Monolayers
  • Single Crystals
  • Spectra
  • Spin-Orbit Interaction
  • Thick Films

Readers

  • Computational Modeling and Simulation
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene