Scaled up Fabrication of High-Throughout SWNT Nanoelectronics and Nanosensor Devices

Abstract

The project's primary goal was to build integrated, on-chip carbon nanotube based devices that could be used as multi-agent sensors. The main tasks were controlled growth of carbon nanotubes of various types, for integration into the on-chip sensor, fabrication of the carbon nanotube based sensor devices and, the electrical and other relevant characterization. The project was done in collaboration with personnel at the Army Research Laboratory.

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Document Details

Document Type
Technical Report
Publication Date
Apr 20, 2007
Accession Number
ADA482603

Entities

People

  • Pulickel Ajayan

Organizations

  • Rensselaer Polytechnic Institute

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Carbon Nanotubes
  • Chemical Vapor Deposition
  • Electrical Measurement
  • Electron Beam Lithography
  • Electron Beams
  • Electron Electron Interactions
  • Electron Microscopes
  • Engineering
  • Fabrication
  • Fullerenes
  • Lithography
  • Materials
  • Materials Processing
  • Materials Science
  • Measurement
  • Photolithography
  • Scanning Electron Microscopes

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