A Fast Method of Fully Characterizing Sputtering Angular Dependence (Preprint)
Abstract
A new method has been demonstrated in which a single experiment is used to fully define the sputtering angular dependence of a given material. The method subjects a circular rod of test material to a mono-energetic and highly collimated ion beam. The eroded profile is then measured using optical profilometry; the full sputtering angular dependence curve is then extracted using a numerical approach.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 17, 2008
- Accession Number
- ADA484432
Entities
People
- Alexander C. Barrie
- Lubos Brieda
- Michael Nakles
- Michael W. Gorrilla
Organizations
- Air Force Research Laboratory