A Fast Method of Fully Characterizing Sputtering Angular Dependence (Preprint)

Abstract

A new method has been demonstrated in which a single experiment is used to fully define the sputtering angular dependence of a given material. The method subjects a circular rod of test material to a mono-energetic and highly collimated ion beam. The eroded profile is then measured using optical profilometry; the full sputtering angular dependence curve is then extracted using a numerical approach.

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Document Details

Document Type
Technical Report
Publication Date
Jun 17, 2008
Accession Number
ADA484432

Entities

People

  • Alexander C. Barrie
  • Lubos Brieda
  • Michael Nakles
  • Michael W. Gorrilla

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force Research Laboratories
  • Angle Of Incidence
  • Electric Propulsion
  • Engineering
  • Engineers
  • Erosion
  • Hall Thrusters
  • Ion Beams
  • Ion Thrusters
  • Ions
  • Materials
  • Measurement
  • Quartz Crystal Microbalances
  • Simulations
  • Sputtering
  • Thrust
  • Thrusters

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Plasma Physics.
  • Systems Analysis and Design