Preliminary Results of Low Energy Sputter Yields of Boron Nitride due to Xenon Ion Bombardment (Preprint)

Abstract

We describe the development of an experimental apparatus geared towards measurement of boron nitride sputtering by low energy ions. A four-grid system is used to achieve a collimated beam at low energy (<100 eV). A weight loss approach is used to measure total sputter yields and a quartz crystal microbalance (QCM) is used to measure differential sputter yield profiles of condensable components. Integration of the QCM profiles also gives total sputter yields of condensable components. We report initial results of total and differential sputter yield measurements of three grades of boron nitride due to bombardment by xenon ions with ion energies in the range of 60-250 eV and at ion incidence angles of 0, 15, and 45 degrees from normal. Comparison with past measurement results are made where possible.

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Document Details

Document Type
Technical Report
Publication Date
Jul 07, 2008
Accession Number
ADA484950

Entities

People

  • Azer P. Yalin
  • Binyamin Rubin
  • Cody C. Farnell
  • James L. Topper

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Air Force Research Laboratories
  • Body Weight
  • Ceramic Materials
  • Electric Propulsion
  • Hall Thrusters
  • Ion Thrusters
  • Mass Spectrometry
  • Materials
  • Materials Processing
  • Materials Science
  • Measurement
  • Mechanical Engineering
  • Microbalances
  • Quartz Crystal Microbalances
  • Refractory Metals
  • Thrusters

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.