Oxide Films for RF Applications

Abstract

Several types of oxide superlattice structures were grown by MBE method and characterized by x-ray diffraction and TEM. SrmTiO2+m (m=2,3,4, and 5) phases having one TiO2 layer sandwiched between m SrO layers were grown using molecular beam epitaxy. X-ray diffraction and electron microscopy confirmed the artificially layered structures. Locally nonstoichiometric superlattices (SrO)m(TiO2)m (m from 2 to 33) inter-reacted during growth to form highly-crystalline epitaxial SrTiO3. The relaxation of Ba0.6 Sr0.4TiO3 films grown on SrTiO3(III) substrates by pulsed laser deposition method was studied using transmission electron microscopy. It was observed that misfit dislocations form a triangular network in (III)-oriented films with dislocation lines in <11-2> directions and the Burgers vector are of a<1-10> type. This observation is not consistent with the accepted slip system <100>{010}. Instead, we proposed that <110>{1-10} slip system is active in heteroepitaxy in the studied material system.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2008
Accession Number
ADA485103

Entities

People

  • M. Skowronski

Organizations

  • Carnegie Mellon University

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms

DTIC Thesaurus Topics

  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Diffraction
  • Electron Microscopy
  • Electrons
  • Engineered Materials
  • Epitaxial Growth
  • Films
  • Materials
  • Microscopy
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Oxide Films
  • Transmission Electron Microscopy
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Adaptive Control and Estimation with Uncertainty in Dynamic Systems.
  • Nanofabrication and Microfabrication.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene