Oxide Films for RF Applications
Abstract
Several types of oxide superlattice structures were grown by MBE method and characterized by x-ray diffraction and TEM. SrmTiO2+m (m=2,3,4, and 5) phases having one TiO2 layer sandwiched between m SrO layers were grown using molecular beam epitaxy. X-ray diffraction and electron microscopy confirmed the artificially layered structures. Locally nonstoichiometric superlattices (SrO)m(TiO2)m (m from 2 to 33) inter-reacted during growth to form highly-crystalline epitaxial SrTiO3. The relaxation of Ba0.6 Sr0.4TiO3 films grown on SrTiO3(III) substrates by pulsed laser deposition method was studied using transmission electron microscopy. It was observed that misfit dislocations form a triangular network in (III)-oriented films with dislocation lines in <11-2> directions and the Burgers vector are of a<1-10> type. This observation is not consistent with the accepted slip system <100>{010}. Instead, we proposed that <110>{1-10} slip system is active in heteroepitaxy in the studied material system.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2008
- Accession Number
- ADA485103
Entities
People
- M. Skowronski
Organizations
- Carnegie Mellon University