Mechanical Testing System for MEMS and Small Scale Samples at Cold and Elevated Temperatures

Abstract

A mechanical testing system was acquired by this DURIP grant for mechanical characterization of micron and millimeter-scale specimens at low (> -150 deg C), and room to moderate temperatures (0-315 deg C). The acquired instrumentation utilizes magneto-mechanical actuation that permits mechanical testing of micron and millimeter size specimens requiring ultra high force resolution (0.5 mN) and fine displacement control (~50 nm), which are not possible with conventional servohydraulic or DC motor based mechanical testing machines. The equipment has been integrated in the PI's laboratory and has already facilitated AFOSR supported research on fracture of silica epoxy nanocomposites. it is expected that it will further be of service in future AFOSR research on small-scale measurements in MEMS and thin films.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2008
Accession Number
ADA485120

Entities

People

  • Ioannis Chasiotis

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Actuators
  • Advanced Materials
  • Air Force
  • Air Force Research Laboratories
  • Composite Materials
  • Dc Motors
  • Displacement
  • Engineering
  • Films
  • High Resolution
  • High Temperature
  • Instrumentation
  • Materials
  • Measurement
  • Mechanics
  • Nanocomposites
  • Thin Films

Readers

  • Integrated Circuit Design and Technology.
  • Powder metallurgy of Titanium alloys.
  • Research Science/Academic Research