Nano-Thermoelectric Devices Fabricated by Ion Beam Writing

Abstract

A lithographic process has been developed to construct the suspended structure. The self-heating 3W method and measurement systems for nanoscale material have been constructed. The thermal conductivity and specific heat of diameter of 180nm nickel sire are 23 W/m-K and 64.6 J/mol-K (at 25C), respectively. A 30 nano-wire has been fabricated for concept demonstration.

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Document Details

Document Type
Technical Report
Publication Date
Sep 24, 2007
Accession Number
ADA486829

Entities

People

  • C. T. Chen
  • M. N. Ou
  • Maw K. Wu
  • P. C. Lee
  • Y. Y. Chen

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Conductivity
  • Crystal Structure
  • Diameters
  • Electrical Conductivity
  • Electron Beam Lithography
  • Energy
  • Ion Beams
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Measurement
  • Nanotechnology
  • Solar Cells
  • Solar Energy
  • Specific Heat
  • Thermal Conductivity
  • Transport Properties

Readers

  • Nanofabrication and Microfabrication.
  • Thermal Physics or Thermal Science.