Initial Results on Rugged Low Power Compact Silicon MEMS Sensors for Use in Nuclear Explosion Monitoring
Abstract
In this paper we present initial experimental results of our ongoing development of a family of high Q-factor in-plane microelectromechanical systems (MEMS) seismic sensors. Devices have been constructed that demonstrate all the required components of MEMS seismic sensor, these include 11.5-Hz, high `Q", silicon spring mass systems, multiple electro-magnetic actuators integrated onto the proof mass, and a highly accurate displacement transducer based on our Linear Capacitive Array Transducer (LCAT). The performance of each of these elements is discussed in the paper. The difficulties encountered in the assembly of these devices and the progress in transferring this technology to a commercial MEMS fabrication is also discussed. The result of a separate study on the potential use of these devices in high shock conditions is also presented. The devices have been integrated with electronics, both to characterize the performance of the individual sensor elements but also to complete the overall system by providing force feedback to the sensor die to form a force-feedback sensor. We present our initial results on using simple proportional feedback electronics with the device to form a force-feedback accelerometer and show that the performance is closely simulated by our theoretical models.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 30, 2008
- Accession Number
- ADA487593
Entities
People
- Ian M. Standley
- W. T. Pike