Processing Method for Creating Ultra-Thin Lead Zirconate Titanate (PZT) Films Via Chemical Solution Deposition

Abstract

This report summarizes the effort to use modifications to a lead zirconate titanate (PZT) chemical solution process to create high performance ferroelectric, dielectric, and piezoelectric thin films with reduced film thicknesses.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2008
Accession Number
ADA490263

Entities

People

  • Richard Piekarz
  • Ronald G. Polcawich

Organizations

  • United States Army Research Laboratory

Tags

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Complementary Metal-Oxide Semiconductors
  • Dielectric Permittivity
  • Electrical Properties
  • Field Effect Transistors
  • Films
  • Lead Zirconate Titanates
  • Materials
  • Metal Oxide Semiconductors
  • Metal Oxides
  • Optical Images
  • Semiconductors
  • Thickness
  • Thin Film Capacitors
  • Thin Films
  • Titanates
  • Zirconates

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.