Q5 Known Good Substrates Technical Report

Abstract

The Known Good Substrates (KGS) Phase II program was initiated 29 August 2007. Wafer, epitaxy, modeling and metrology work has been the main focus of efforts in Q5. This technical report summarizes the progress by all team members against the tasks and milestones.

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Document Details

Document Type
Technical Report
Publication Date
Dec 30, 2008
Accession Number
ADA492368

Entities

People

  • Eric P. Carlson
  • Gilyong Chung
  • Mark J. Loboda
  • Rebecca S. Lauer

Organizations

  • Dow Corning

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Accuracy
  • Crystal Growth
  • Crystal Structure
  • Crystals
  • Diameters
  • Diodes
  • Electrical Measurement
  • Epitaxial Growth
  • Failure Analysis
  • Hot Spots
  • Materials
  • Measurement
  • Metrology
  • Military Research
  • Phase
  • Substrates
  • Surface Roughness

Fields of Study

  • Chemistry

Readers

  • Technical Research and Report Writing.
  • Thin Film Deposition Science.