Frequency Response of Nanoelectromechanical Cantilevers Operating in Fluid
Abstract
Nano-electro-mechanical resonators used for sensing, data storage, and nano-fabrication applications are often operated as feed-back control systems. To determine the transfer function of silicon cantilevers with a width of 5.0 micrometer, a thickness of 800 nm, and lengths of 10, 15, 30, and 45 micrometer, the damping in air and liquid was simulated numerically using an integrated fluidstructure solver. Bode diagrams and Nyquist plots of the cantilever transfer function indicate that the resonator will behave as a heavily damped system in liquid, and a lightly damped system in air. After experimental validation, ths computational method is expected to allow prediction of frequency response prior to fabrication of NEMS resonators.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 2008
- Accession Number
- ADA495631
Entities
People
- Brian H. Houston
- Michael J. Martin
Organizations
- United States Naval Research Laboratory