Q5 Known Good Substrates Technical Report

Abstract

The Known Good Substrates (KGS) Phase II program was initiated 29 August 2007. Subcontractor work on CVD modeling and analysis of epitaxy experiments have been the main focus of efforts in Q6. This technical report summarizes the progress by all team members against the tasks and milestones. This is the final technical quarterly summary for the KGS Phase II program. It is part of the contract extension where consideration was given by NRL to allow additional subcontractor work on CVD modeling and time for analysis of epitaxy experiments designed to improve the epitaxy doping uniformity.

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Document Details

Document Type
Technical Report
Publication Date
Mar 31, 2009
Accession Number
ADA495957

Entities

People

  • Eric P. Carlson
  • Gilyong Chung
  • Mark J. Loboda
  • Rebecca S. Lauer

Organizations

  • Dow Corning

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Accuracy
  • Chemistry
  • Contractors
  • Contracts
  • Crystal Growth
  • Crystal Structure
  • Crystals
  • Diameters
  • Grain Boundaries
  • High Voltage
  • Materials
  • Measurement
  • Metal-Semiconductor Junctions
  • Phase
  • Semiconductors
  • Silicon Carbide
  • Substrates

Readers

  • Technical Research and Report Writing.
  • Thin Film Deposition Science.