Design and Fabrication of Microheaters for Localized Carbon Nanotube Growth

Abstract

This paper presents a reliable method for the growth of single-walled carbon nanotubes (SWNTs) at room temperature by using localized heating. A surface micromachining technique is used to create suspended microstructures for good thermal isolation. Pt resistors are integrated as the heating source, and the local growth temperature and electrical field can be controlled by the heater geometry and applied voltage. Growth of aligned nanotubes with diameters ranging from 1-10 nm has been demonstrated along the local E-field with a measured minimum resistance of approximately 12 k omega. High-resolution thermal imaging was used to study the temperature distribution of the local heating.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 2008
Accession Number
ADA495968

Entities

People

  • A. Ural
  • Hongen Xie
  • Joel T. Johnson
  • Liang Wu
  • S. Maley
  • Yifan Zhou

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Carbon Nanotubes
  • Chemical Vapor Deposition
  • Detectors
  • Engineering
  • Fabrication
  • Films
  • Fullerenes
  • Geometry
  • Heaters
  • Heating
  • High Resolution
  • Hot Spots
  • Manufacturing
  • Materials
  • Micromachining
  • Resistance
  • Vapor Deposition

Readers

  • Electrical Engineering
  • Nanocomposite Materials Science
  • Thin Film Deposition Science.