Quantum Computing Graduate Research Fellow for Development of a Short Loop Superconducting Fab Process

Abstract

This project dealt with nanofabrication by metal-trilayer evaporation and liftoff. It included fabrication of Josephson-junction structures, and development of novel methods for metal liftoff at the sub-10-nm length scale. The ultra-narrow features developed in this project also have direct relevance to the nanofabrication of nanowire phase-slip qubits, which would provide an interesting alternative approach to superconducting qubits.

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Document Details

Document Type
Technical Report
Publication Date
Nov 14, 2008
Accession Number
ADA499286

Entities

People

  • Karl K Berggren
  • Terry Orlando

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Acquisition
  • Aspect Ratio
  • Computer Science
  • Contrast
  • Department Of Defense
  • Electrical Engineering
  • Electron Beam Lithography
  • Electron Beams
  • Electrons
  • Evaporation
  • Fabrication
  • High Resolution
  • Josephson Junctions
  • Nanofabrication
  • Nanowires
  • Phase
  • Quantum Computing

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Quantum Computing