Q2 Known Good Substrates Technical Report
Abstract
The Known Good Substrates (KGS) Phase III program was initiated 29 September 2008. Wafer, epitaxy, modeling and metrology work has been the main focus of efforts in Q2. This technical report summarizes the progress by all team members against the tasks and milestones.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 05, 2009
- Accession Number
- ADA499406
Entities
People
- Eric Carlson
- Gilyong Chung
- Mark Loboda
- Rebecca Lauer
Organizations
- Dow Corning