Novel MEMS Apparatus for In Situ Thermo-Mechanical Tensile Testing of Materials at the Micro- and Nano-Scale (Preprint)

Abstract

We present, for the first time, a MEMS-based test methodology that potentially enables elevated-temperature mechanical tensile testing of nano- and micro-scale samples within a SEM or TEM (T > 500 degrees C). Importantly, the test methodology allows for the samples to be fabricated separately from the MEMS-apparatus, a significant advancement from other test devices developed by some of the present authors. Therefore the test methodology should be applicable to the study of a wide range of materials. Other advancements found in the methodology include a co-fabricated force calibration device, and a built-in thermocouple sensor to measure the stage temperature close to the sample.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 2009
Accession Number
ADA502102

Entities

People

  • Jinchen Han
  • M. D. Uchic
  • T. Saif

Organizations

  • Air Force Research Laboratory

Tags

DTIC Thesaurus Topics

  • Air Force
  • Air Force Facilities
  • Air Force Research Laboratories
  • Calibration
  • Etching
  • Fabrication
  • Films
  • Grain Size
  • Illinois
  • Manufacturing
  • Materials
  • Materials Processing
  • Materials Testing
  • Measurement
  • Mechanical Properties
  • Tensile Testing
  • United States

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