Effects of Differing Carbon Nanotube Field-effect Transistor Architectures

Abstract

Single-walled carbon nanotube field-effect transistors (SWCNTFETs) were fabricated with varying device architectures. Variations on the standard back-gated architecture included varying the gate oxide material and thickness, changing source and drain contact metallization, suspending the carbon nanotubes to minimize interaction with the gate oxide, and fabricating a topgated architecture employing a thin layer of aluminum oxide (Al2O3) as the gate oxide. Devices were characterized and compared to each other based on the CNTFET properties of noise, hysteresis, sub-threshold slope, and threshold voltage. Results show that some properties of the CNTFET, such as hysteresis and noise can be modified; other properties, however, are intrinsic to the CNT.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2009
Accession Number
ADA502660

Entities

People

  • Andrew M. Dorsey
  • Matthew H. Ervin

Organizations

  • United States Army Research Laboratory

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Aluminum Oxides
  • Carbon Nanotubes
  • Chemical Vapor Deposition
  • Electron Microscopy
  • Electronic Components
  • Field Effect Transistors
  • Fullerenes
  • Hysteresis
  • Materials
  • Metals
  • Microscopes
  • Oxides
  • Thickness
  • Transistors
  • Vapor Phases
  • Work Functions

Fields of Study

  • Materials science

Readers

  • Nanocomposite Materials Science
  • Semiconductor Device Technology